Vacuum Gauge

The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. 

Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment.

INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. 

CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability.

The TripleGauge® BCG552 combines 3 vacuum sensing elements in one sensor flange. This flagship of the new TrigonTM family offers a extremely wide measurement range from UHV (5 x10-10) up to ATM (1500 mbar). With its added ATM sensor, BCG552 is well-suited for differential pressure measurement and for use as vacuum switch in several applications.

The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). 

Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace. 

The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.

The INFICON Pirani Gauge Enhanced (PGE) DeviceNet version is equipped with the latest digital convection enhanced Pirani technology available on the market.

Due to the physical properties of convection this type of Pirani offers higher accuracy in the measurement range between 100 to 1000 mbar.

The INFICON Pirani Gauge Enhanced 500 (PGE500) is equipped with the latest digital convection enhanced Pirani technology available on the market. 

Due to the physical properties of convection this type of Pirani offers higher accuracy in the measurement range between 100 to 1000 mbar.

The INFICON Pirani Gauge Enhanced 300 (PGE300) like it's bigger brother PGE500 is equipped with the latest digital convection enhanced Pirani technology available on the market. 

Equipped with the same sensor components as the PGE500, the PGE300 yields the same higher accuracy readings in the measurement range between 100 to 1000 mbar.

The Pirani Gauge Enhanced 050 (PGE050) is the passive version of our active convection enhanced Pirani gauges PGE300 and PGE500. Equipped with the same sensor technology, the PGE050 works in conjunction with our VGC031 and VGC083 passive gauge controller units.