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The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere).
Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.
Advantages
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
| Measurement range (air, N2) | mbar Torr |
5 x 10-9 … 1000 3.8 x 10-9 … 760 |
| Accuracy | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±30% |
| Repeatability | ||
| 1 x 10-8 … 100 mbar | % of reading | ≈±5% |
| Temperature | ||
| Operation (ambient) | °C | +5 … +55 |
| Storage | °C | –40 … +65 |
| Bake-out (1) | °C | 150 |
| Supply voltage | ||
| At gauge | V (dc) | +15 … +30 |
| At supply unit with max. cable length (2) | V (dc) | +16 … +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | stainless steel, Al2O3, FPM75, Mo, Ni, Au, W | |
| (1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable. |
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